| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond element excellent in height uniformity not affected by grain boundary among crystals. <P>SOLUTION: In the subject manufacturing method, a first step in which a resist arranged with a pattern of a plurality of minute circles is formed, a second step in which a substrate is processed into a structure in which a plurarity of cylinders are protruded from the surface of the substrate by etching, and a third step in which the cylinders are rearranged into quadrangular prisms by exposing the substrate processed in the second step to a plasma of a gas mainly composed of hydrogen, then a diamond crystal having a (111) face as an exposed face is grown from the border of the quadrangular prisms and the surface of the substrate, and at the same time the tops of the quadrangular prisms are sharpened, are carried out on a diamond single crystal substrate having a (100) face on its surface, and the third step is finished before the diamond crystal is grown from the border of the quadrangular prisms and the surface of the substrate reaches the tops of the quadrangular prisms. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
