摘要 |
<P>PROBLEM TO BE SOLVED: To provide an energy ray sensitive acid generator having high sensitivity to energy rays, especially light of 300-400 nm wavelength region without using a sensitizer and effectively usable in various uses such as acid-catalyzed polymerization reaction, crosslinking reaction and decomposition reaction. <P>SOLUTION: The energy ray sensitive acid generator is expressed by general formula (1) (R<SB>01</SB>, R<SB>02</SB>, R<SB>03</SB>, R<SB>04</SB>and R<SB>05</SB>are each hydrogen atom or the like provided that at least one of the groups is SR<SB>31</SB>; R<SB>31</SB>is an alkyl or the like; R<SB>11</SB>and R<SB>12</SB>are each hydrogen atom or the like; R<SB>21</SB>and R<SB>22</SB>are each an alkyl or the like; and X<SP>-</SP>is an arbitrary anion). <P>COPYRIGHT: (C)2005,JPO&NCIPI |