| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device and method for producing super-high purity nitrogen, in which super-high purity nitrogen can be efficiently collected by using nitrogen as as raw material. <P>SOLUTION: The device and method comprise steps of raising the pressure of raw material nitrogen gas containing hydrogen, carbon monoxide and oxygen but free from steam and carbon dioxide; removing the hydrogen and carbon monoxide in the raw material nitrogen gas; cooling the raw material nitrogen gas; separating the cooled raw material nitrogen gas to a super-high purity nitrogen gas and a liquefied gas with a concentrated high-boiling point component in a rectifying column; heat-exchanging the super-high purity nitrogen gas with the liquefied gas to make the liquefied gas to a waste gas and the super-high purity nitrogen gas to a reflux liquid; delivering part of the super-high purity nitrogen gas as product super-high purity nitrogen gas; making the residue of the super-high purity nitrogen gas to a circulating nitrogen gas by raising its pressure; cooling the circulating nitrogen gas; vaporizing the liquefied gas with the cooled circulating nitrogen gas to obtain an ascending gas; and introducing the liquefied circulating liquefied nitrogen to the upper part of the rectifying column. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
