FOREIGN MATTER INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter inspecting method capable of enhancing S/N of the light from foreign matter by reducing the effect of the reflected light and diffracted light from a pattern while lowering a foreign matter detecting a lower limit in the inspection of the foreign matter of a substrate with a non-cyclic pattern. SOLUTION: A polarizing filter on a light detecting side for cutting the light emitted from the pattern present on an inspection surface is provided to the light detecting system of this foreign matter inspection device. The polarizing filter comprises a plurality of regions and the polarizing direction of each of the regions is a direction for interrupting the polarization from an incident pattern while the transmissivity of each of the regions is made inversely proportional to the polarization from the pattern. COPYRIGHT: (C)2005,JPO&NCIPI