| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve realizing reduction of weight and costs, and reduction of a conveyance arm stroke by substantially reducing a thickness size. SOLUTION: The gate valve 14L has a long valve element 18L formed in a size capable of blocking a horizontally long substrate carry-in outlet 12L, a valve element support part 20 supporting the valve element 18L so it can move between a first valve element device for blocking the substrate carry-in outlet 12L, a second valve element device retreated below a forward movement position and the lower substrate carry-in outlet 12L, or an original position (a position shown in the figure), a valve element moving mechanism 22 moving the valve element 18L between the forward movement position and the original position via the valve element support part 20, and a valve element pressing part 24 contacting or connected to an outer side face of the valve element 18L positioned in the forward movement position to press the valve element 18L against a chamber side wall 10a. COPYRIGHT: (C)2005,JPO&NCIPI
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