| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve for vacuum pressure regulation capable of controlling the rate of fluid flow precisely while the startup of the rate of flow remains gradual when its valve member opens the valve seat. SOLUTION: The valve for vacuum pressure regulation is structured so that a cylindrical blind 22 surrounding the periphery of bellows 20 is attached to the valve member 15 to open and close the valve seat 14, wherein the axial direction length of the blind 22 is as large as concealing the second opening 13a in its whole area when the valve member 15 closes the valve, and the gap W1 between the outside surface of the blind 22 and the inside surface of the valve hole 11 is formed small as much as practicable within the range that the two surfaces can keep the mutually non-touching condition so as to enable restriction of turning-around of the fluid to the periphery of the bellows 20 through the gap. COPYRIGHT: (C)2005,JPO&NCIPI
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