| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical speed meter capable of miniaturization and of low power consumption, and of detecting highly accurately the two-dimensional moving speed of a measuring object. SOLUTION: This optical speed meter consists of a light emitting element 30, a diffraction grating 20, two light receiving parts 31, 32 and a signal processing circuit 60. Radiation light from the light emitting element 30 is branched into three beams by the diffraction grating 20, and optical axes of respective branched beams are superposed on the measuring object 13, to thereby form one detection point 14. Then, diffused light having frequency deviation generated by movement of the measuring object 13 from the detection point 14 is received by the two light receiving parts 31, 32, and a signal processing of light receiving signals output from the light receiving parts 31, 32 is performed by a signal processing circuit 60, to thereby detect moving speeds in the two directions of the measuring object 13. COPYRIGHT: (C)2005,JPO&NCIPI
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