| 摘要 |
A method of making interferometric measurements of an object, the method including: generating an input beam (124) that includes a plurality of component beams (126A, 126B), each of which is at a different frequency and all of which are spatially coextensive with each other, some of the components having a first polarization and the rest having a second polarization that is orthogonal to the first polarization; deriving a plurality of measurement beams (128C, 128D) from the plurality of component beams, each of the plurality of measurement beams being at the frequency of the component beam from which it is derived; focusing the plurality of measurement beams onto a selected spot (160) to produce a plurality of return measurement beams; combining each of the return measurement beams of the plurality of return measurement beams with a different corresponding reference beam of a plurality of reference beams to produce a plurality of interference beams; and acquiring a plurality of electrical interference signal values for the selected spot from the plurality of interference beams. |
