| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency power supply apparatus for detecting whether abnormality is caused by the high-frequency power supply apparatus or not by detecting whether a power value of traveling wave power or load power outputted from the high-frequency power supply apparatus is normal to an output setting or not. <P>SOLUTION: The high-frequency power supply apparatus is provided with a first load power calculating part 40 for finding the load power by subtracting reflection wave power from the traveling wave power detected by a power detecting part 30, an output current detecting part 51 for detecting a current on a transmission line between a power output and an output end of the high-frequency power supply apparatus, an output voltage detecting part 52 for detecting a voltage on the transmission line between the power output and the output end of the high-frequency power supply apparatus, a second load power calculating part 53 for finding the load power based on outputs from the output current detecting part and the output voltage detecting part, and an abnormality determining part for determining whether the high-frequency power supply apparatus is abnormal or not based on the load power found by the first and second load power calculating parts 40, 53. In the high-frequency power supply apparatus for implementing a feedback control for configuring the traveling wave power or the load power outputted from the power output to the load as the output setting, a problem such that the abnormality is not detected even if the detecting part is abnormal, is overcome. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
