| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the amount of electrostatic charge generated in an original or a pellicle and prevent the electrostatic discharge damage of a circuit pattern in the original upon handling the original or purging inert gas in the space of the pellicle. <P>SOLUTION: The original transporting device is provided with a transporting means or a reticle hand 15 for supporting the original or the reticle 23 employed in the exposure of a semiconductor, and an earth 53 for releasing an electrostatic charge charged on the reticle. The earth is constituted on the fork unit 51 of the transporting means, and a contact area between the earth and the reticle is extremely small with respect to the contact area between an attraction pad 52 on the supporting member or the hand 15 for supporting the reticle previously and the reticle. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
