发明名称 SOLID-STATE IMAGING APPARATUS AND MANUFACTURING METHOD OF SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent the image deterioration of a solid-state imaging apparatus by preventing the generation of false signals such as flares by preventing the incidence of a reflected light by a test pad on a CCD image section while enabling to perform a predetermined internal circuit setting and to extract a characteristics evaluation data by using the test pad. <P>SOLUTION: After an electrical inspection is performed by electrically connecting a probe 20 to a conductive film 17 which is the test pad for the setting of the internal circuit or the evaluation of the characteristics, an antireflection coating 19 is formed on the conductive film 17 which is the test pad. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005079548(A) 申请公布日期 2005.03.24
申请号 JP20030311845 申请日期 2003.09.03
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAYASHI SHOICHI
分类号 H01L21/66;H01L27/14;(IPC1-7):H01L27/14 主分类号 H01L21/66
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