发明名称 |
SOLID-STATE IMAGING APPARATUS AND MANUFACTURING METHOD OF SAME |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the image deterioration of a solid-state imaging apparatus by preventing the generation of false signals such as flares by preventing the incidence of a reflected light by a test pad on a CCD image section while enabling to perform a predetermined internal circuit setting and to extract a characteristics evaluation data by using the test pad. <P>SOLUTION: After an electrical inspection is performed by electrically connecting a probe 20 to a conductive film 17 which is the test pad for the setting of the internal circuit or the evaluation of the characteristics, an antireflection coating 19 is formed on the conductive film 17 which is the test pad. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005079548(A) |
申请公布日期 |
2005.03.24 |
申请号 |
JP20030311845 |
申请日期 |
2003.09.03 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
HAYASHI SHOICHI |
分类号 |
H01L21/66;H01L27/14;(IPC1-7):H01L27/14 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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