MULTILAYER FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical device which has high reliability and low light loss. SOLUTION: This multilayer film has: a coupling film which is formed on a substrate and contains a zirconium component and a titanium component; and a fluorine-containing polyimide film which is formed on the coupling film. COPYRIGHT: (C)2005,JPO&NCIPI