| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-performance interferometer of a simplified constitution. SOLUTION: The interferometer is provided with a compensation optical system (15) for converting the wavefront of illuminating luminous flux emitted from a light source; an image forming optical system (13) for forming a reduced image of a surface to be inspected or its conjugate surface; a detecting means (21) for detecting the luminance distribution of a surface in which the reduced image is formed or its conjugate surface; and a light guiding means (16) for projecting the illuminating luminous flux, emitted from the compensation optical system, to the surface to be inspected from the image side of the image-forming optical system via the image-forming optical system. The compensation optical system converts the wavefront in a direction which compensates the telecentricity of the object side of the image-forming optical system. COPYRIGHT: (C)2005,JPO&NCIPI |
