| 摘要 |
A method for manufacturing a photoresist-coated glass board includes steps of forming a resin layer containing a benzophenone system compound on a glass board, forming a photoresist layer on the resin layer, intermittently projecting a laser beam for exposure having a wavelength lambda of 100 nm to 300 nm onto the photoresist layer, forming a latent image of a pit pattern so that a half-width l of a shortest pit length is equal to or shorter than 0.65 lambda, and developing the photoresist layer in which the latent image is formed to form a pit pattern in the photoresist layer. According to thus constituted method for manufacturing a photoresist-coated glass board, a photoresist-coated glass board can be formed with pits of a pit pattern in a desired manner using a laser beam having a short wavelength.
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