发明名称 CHEMISORBENT SYSTEM FOR ABATEMENT OF EFFLUENT SPECIES
摘要 A dry scrubbing system for treatment of effluent from an upstream effluent-generating process. The dry scrubbing system accommodates operation in a process window involving substantial variation in process conditions, e.g., flow rate and/or concentration, of scrubbable gas species in the effluent. Multiple scrubbing media are utilized in the dry scrubbing system, each optimal in a regime of the operating window, and together ensuring at least a predetermined level of removal of scrubbable gas species over the entire operating window. In a specific aspect, gaseous phosphorus in the effluent is abated by use of potassium hydroxide as an active abatement agent.
申请公布号 WO2005025733(A2) 申请公布日期 2005.03.24
申请号 WO2004US29382 申请日期 2004.09.10
申请人 ADVANCED TECHNOLOGY MATERIALS, INC.;MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D. 发明人 MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D.
分类号 B01D53/02;B01D53/12;B01D53/22;B01D53/68;B01D59/26;B01J 主分类号 B01D53/02
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