发明名称 |
CHEMISORBENT SYSTEM FOR ABATEMENT OF EFFLUENT SPECIES |
摘要 |
A dry scrubbing system for treatment of effluent from an upstream effluent-generating process. The dry scrubbing system accommodates operation in a process window involving substantial variation in process conditions, e.g., flow rate and/or concentration, of scrubbable gas species in the effluent. Multiple scrubbing media are utilized in the dry scrubbing system, each optimal in a regime of the operating window, and together ensuring at least a predetermined level of removal of scrubbable gas species over the entire operating window. In a specific aspect, gaseous phosphorus in the effluent is abated by use of potassium hydroxide as an active abatement agent. |
申请公布号 |
WO2005025733(A2) |
申请公布日期 |
2005.03.24 |
申请号 |
WO2004US29382 |
申请日期 |
2004.09.10 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC.;MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D. |
发明人 |
MARGANSKI, PAUL, J.;SWEENEY, JOSEPH, D. |
分类号 |
B01D53/02;B01D53/12;B01D53/22;B01D53/68;B01D59/26;B01J |
主分类号 |
B01D53/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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