| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting defects, which can surely and easily extract a defocused region by imaging an image, in particular, that of specular reflection image of an object to be inspected. SOLUTION: The method which uses an imaging system equipped with an irradiation device irradiating the inspected object with light and an imaging device photographing the image of the inspected object on the basis of at least light from the inspected object, and which carries out inspection of the defects of the object to be inspected, is provided with: a step in which by using a nondefective object, images of the nondefective object are photographed under a plurality of different photographic conditions, thereby obtaining a plurality of reference images; a step in which the images of the object to be inspected are imaged under conditions identical to those of the plurality of reference images, thereby obtaining a plurality of inspection images; a step in which difference values of the luminances between the reference images and the inspection images obtained under identical conditions are calculated; and a step in which the calculated difference values, corresponding to the plurality of photographing conditions, are added to each other. COPYRIGHT: (C)2005,JPO&NCIPI
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