| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a nozzle plate equipped with a first nozzle hole (orifice) with high forming accuracy, which can enhance the stability of the accuracy of the shape of the nozzle plate by preventing damage to a droplet ejection surface in a manufacturing process. SOLUTION: After a process in which a sacrificial layer is formed on a substrate, the nozzle plate, where a shielding layer 3 having higher etching resistance than a first nozzle layer 1 is interposed, is formed between the nozzle layer 1 with the first nozzle hole 11a for ejecting a liquid substance onto the sacrificial layer, and a second nozzle layer 2 with a second nozzle hole 11b which communicates with the nozzle hole 11a and which is subject to the supply of the liquid substance. After that, the sacrificial layer is removed by etching, so that the nozzle plate can be separated from the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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