发明名称 |
Method and apparatus for measuring sheet resistance |
摘要 |
A resistance measurement circuit includes a plurality of current sources, a plurality of resistor strings and a comparator. Each resistor string is coupled in series with a respective one of the current sources and includes a plurality of nodes with different resistances relative to a reference node. Each node in each resistor string has a different resistance relative to the reference node than corresponding nodes in the other resistor strings. The comparator has a first comparison input coupled to a reference voltage and a second comparison input selectively coupled to the plurality of nodes in each resistor string.
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申请公布号 |
US6870386(B1) |
申请公布日期 |
2005.03.22 |
申请号 |
US20030691938 |
申请日期 |
2003.10.23 |
申请人 |
LSI LOGIC CORPORATION |
发明人 |
GOLLIHER SEAN A.;SAVAGE SCOTT C.;MCNITT JOHN L. |
分类号 |
G01R27/02;(IPC1-7):G01R31/26 |
主分类号 |
G01R27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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