Linear motor and stage apparatus, exposure apparatus, and device manufacturing method using the same

摘要

A linear motor includes a magnet array having a plurality of first magnets arrayed such that polarization directions thereof are periodically opposite, and a plurality of second magnets arrayed such that polarization directions thereof are periodically opposite and intersect those of the first magnets. The linear motor further includes an electromagnetic coil disposed to oppose the magnet array to generate a Lorentz force in cooperation with the magnet array and a yoke integrated with the coil at a first side opposite to a second side of the coil disposed opposite to the magnet array.