| 摘要 |
A washing method has a non aqueous washing process of washing an object to be washed using a non aqueous solution, an intermediate washing process of washing the object to be washed using a solution having solubility relative to both an aqueous solution and the non aqueous solution after said non aqueous washing process; and an aqueous washing process of washing the object to be washed with the aqueous solution after said intermediate washing process. When an intermediate washing process is performed between the non aqueous washing process and the aqueous washing process, the non aqueous solution adhered to the object to be washed in the non aqueous washing process is removed in the intermediate washing process, and replaced by a solution having solubility relative to both the non aqueous solution and the aqueous solution, so as to prevent the non aqueous solution from being introduced into the aqueous solution used in the aqueous washing process.
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