发明名称 |
Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor |
摘要 |
The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.
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申请公布号 |
US6869815(B2) |
申请公布日期 |
2005.03.22 |
申请号 |
US20020226930 |
申请日期 |
2002.08.22 |
申请人 |
AGERE SYSTEMS INC. |
发明人 |
GASPARYAN ARMAN;JIN SUNGHO;SHEA HERBERT R.;VAN DOVER ROBERT B.;ZHU WEI |
分类号 |
B81B3/00;G02B6/32;G02B6/35;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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