| 发明名称 |
Method for adjusting capacitance of an on-chip capacitor |
| 摘要 |
A method and apparatus for adjusting capacitance of an on-chip capacitor uses exposure of a dielectric material of the capacitor to an ion beam comprising ions of at least one material to modify a dielectric constant of the dielectric material.
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| 申请公布号 |
US6869895(B1) |
申请公布日期 |
2005.03.22 |
| 申请号 |
US20030674719 |
申请日期 |
2003.09.30 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CLEVENGER LAWRENCE A.;DALTON TIMOTHY J.;HSU LOUIS L.;RADENS CARL;WONG KEITH KWONG HON;YANG CHIH-CHAO |
| 分类号 |
H01G4/255;H01L21/02;H01L21/66;(IPC1-7):H01L21/31 |
主分类号 |
H01G4/255 |
| 代理机构 |
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