发明名称 Thermal anemometry mass flow measurement apparatus and method
摘要 A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe, extends out of the side wall, a heater element secured to the probe, and a seal preventing fluid flowing through the flow path from contacting the heater element.
申请公布号 US6868723(B2) 申请公布日期 2005.03.22
申请号 US20030440371 申请日期 2003.05.16
申请人 MKS INSTRUMENTS, INC. 发明人 SHAJII ALI;KOTTENSTETTE NICHOLAS EUGENE;MYATT R. LEONARD;ANASTAS JEFFREY VINCENT
分类号 G01F1/684;G05D7/06;(IPC1-7):G01F1/66 主分类号 G01F1/684
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