发明名称 |
Calibration tool for a vertical furnace |
摘要 |
A calibration tool for centering an inner tube with respect to an outer tube of a vertical furnace for semiconductor manufacturing including a first alignment member having a plurality of engagement surfaces simultaneously movable radially outward an equal radial distance for engagement with a base structure of a vertical furnace to center the calibration tool with respect to the base structure and the outer tube; a second alignment member having a plurality of engagement surfaces simultaneously movable radially outward an equal radial distance to engage the inner tube and to move the inner tube to a position centered with respect to the outer tube of the vertical furnace.
|
申请公布号 |
US6868601(B2) |
申请公布日期 |
2005.03.22 |
申请号 |
US20020127284 |
申请日期 |
2002.04.22 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
LIN YUNG-PIN |
分类号 |
B23Q3/18;(IPC1-7):B23P19/00;G01D18/00 |
主分类号 |
B23Q3/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|