| 摘要 |
A resonant sensor for diagnosing a working fluid is provided to ensure a travelling stability by continuously checking and confirming a state of a working fluid through accurate information, such as deterioration or dilution of the working fluid of an automobile. A resonant sensor for diagnosing a working fluid includes a silicon substrate(10). A lower electrode(20) having a plurality of strings is positioned at an upper surface of the silicon substrate(10). A bottom space(11) is formed at a bottom of the silicon substrate(10) by taking influence of a squeeze film effect for a high Q-factor into consideration. A plurality of lower electrodes(20) are installed while spaces(21) are maintaining a predetermined distance from each other. A micro mechanical electrical structure is positioned at an upper surface of the silicon substrate(10) in order to sense variation according to deterioration of a working fluid.
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