PRODUCTION LINE SYSTEM AND AUTOMATED WAREHOUSE USED IN THE SYSTEM

摘要

A production line system comprises a core apparatus (10) of a stacker crane form in which system a glass substrate-receiving cassette is stored and transported, and comprises various processing lines for producing color filters, including main screen-making lines (20-70) that execute processing steps including a photolithography process which lines are connected, at plural loading/unloading positions (C1, C2) of the core apparatus, through a substrate loading/unloading mechanism for loading/unloading a glass substrate to and from a cassette on one-by-one basis. At the end of each of the processing steps, defect inspection machines (39-77) can be assembled in it. Lines such as a line (100) for inspecting a processed substrate, a line (110) for regenerating a substrate in which a defect was detected, and a reserve screen-making line (90) can be installed.