发明名称 |
LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM |
摘要 |
<p>Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the' pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.</p> |
申请公布号 |
KR20050027250(A) |
申请公布日期 |
2005.03.18 |
申请号 |
KR20057000958 |
申请日期 |
2005.01.18 |
申请人 |
MYKROLIS CORPORATION |
发明人 |
GASHGAEE, IRAJ;GONNELLA, GEORGE;LAVERDIERE, MARC;MARRS, JENNIFER;MCLOUGHLIN, ROBERT, F. |
分类号 |
G05D7/06;G05D16/20;(IPC1-7):F16K31/12;H01L21/02 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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