| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method in which vibration stability at a resonance frequency is effectively improved in a design of an MEMS scanning mirror and the optical resolution of the MEMS scanning mirror is secured. SOLUTION: The MEMS scanning mirror (100) has a scanning mirror (101), rotating comb-teeth (108), static comb-teeth (109), meandering springs (105A through H), and anchors (104A through G) in a distributed state. The scanning mirror and the rotating comb-teeth are driven by electrostatic force given by teeth in a static plane and/or out of the plane. The mirror is fitted on a rotating comb-teeth structure body with many supporting attachments (102). Many meandering springs play a role as flexible hinges which link a movable structure body with a static supporting structure body. COPYRIGHT: (C)2005,JPO&NCIPI
|
