| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of preventing damage to a chuck table. <P>SOLUTION: In the laser beam machining method, a laser beam is emitted along an intended dividing line 102 formed on a workpiece 10 held on the chuck table by using a laser beam irradiation means. The method includes: a workpiece fixing process in which a workpiece is attachably/detachably fixed on the surface of a protective plate 11; a protective plate holding process in which the protective plate 11 with the workpiece 10 fixed thereon is held on the chuck table; an alignment process in which alignment is performed between the intended dividing line 102 of the workpiece 10 which is fixed on the protective plate 11 held on the chuck table and a position to be irradiated with the laser beam emitted by the laser beam irradiation means; and a laser beam irradiation process in which the laser beam is emitted, along the intended dividing line 102 of the workpiece 10 which is fixed on the protective plate 11 held on the chuck table, by using the laser beam irradiation means. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
