METHOD FOR MANUFACTURING CARBON-BASED TWO-LAYERED FILM EXCELLENT IN PEELING RESISTANCE UNDER WATER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a carbon film excellent in a peeling resistant property under water without providing an intermediate layer. SOLUTION: The method for manufacturing a carbon-based two-layered film comprises forming a film softer than a primary carbon film onto the surface of the primary carbon film. The softer film can be formed by mixing Si, Ti, Cr, Ni or Co into a carbon film, or by containing more hydrogen per mass than the primary carbon film. The carbon-based two-layered film manufactured by this method can be used as a solid lubricating film for a mechanical part that is used under water. COPYRIGHT: (C)2005,JPO&NCIPI