VACUUM FILM FORMING METHOD AND DEVICE, AND FILTER PRODUCED BY USING THEM

摘要

In a film forming method, a base member is installed on a base member holder (6a) where a predetermined heat medium liquid flows in flow paths (7f, 7g, 7j) provided in a vacuum chamber (1), the inside of the vacuum chamber is held in a substantially vacuum state, an evaporation material is evaporated in the vacuum chamber from two or more evaporation sources, the evaporation material evaporated is diffused inside the vacuum chamber, and the diffused evaporation material is deposited on a deposit surface of the base material to form a multi-layer film made from the evaporation material on the deposit surface. In the method, an antifreeze liquid is used as the predetermined heat medium liquid flowing in the flow paths of the base member holder.