The Large-Area Plasma AntennaLAPA and The Plasma Source For Making Uniform Plasma,申请号KR20010043856-传众专利搜索

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发明名称	The Large-Area Plasma AntennaLAPA and The Plasma Source For Making Uniform Plasma
摘要
申请公布号	KR100476902(B1)	申请公布日期	2005.03.17
申请号	KR20010043856	申请日期	2001.07.20
申请人		发明人
分类号	H05H1/34;H01J37/32;H05H1/46;(IPC1-7):H05H1/34	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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