| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a apparatus for laminating a pellicle frame and a pellicle plate for producing a pellicle which is free from misalignment of a transfer pattern, and to provide a high-performance pellicle which is reduced in misalignment of the transfer pattern. <P>SOLUTION: The laminating apparatus is used for manufacturing a framed pellicle comprising a frame 1 having a specified thickness and a pellicle plate 4 made of synthetic quartz glass to be fixed to one face of the frame. The apparatus is equipped with a mechanism to adjust the distance and parallelism between a supporting member to fix the frame 1 and another supporting member to fix the pellicle plate 4, the mechanism being disposed between both of the supporting members and comprising a spacer 8, micrometer 9, precision screw, piezoelectric device or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
