发明名称 Gas collecting device, test head and IC device testing apparatus
摘要 A heating element cooling cover 5 for covering IC devices 44 mounted on a substrate 4, wherein a coolant is circulated to be able to contact the IC devices 44, and a groove 54 (bypath) is provided for an air and the coolant to flow from a gas accumulation part where gas accumulation is liable to be generated inside the heat element cooling cover 5 to a position where the circulating coolant comes downstream of the gas accumulation portion, so that gas accumulation can be effectively removed as a result that the air in the gas accumulation part can pass through the bypath.
申请公布号 US2005056102(A1) 申请公布日期 2005.03.17
申请号 US20040974724 申请日期 2004.10.28
申请人 ADVANTEST CORPORATION 发明人 NISHIURA KOEI
分类号 B01D19/00;G01N1/00;G01R31/28;G12B15/02;H01L23/44;H05K;H05K7/20;(IPC1-7):G01N1/00 主分类号 B01D19/00
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