| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost, low loss spot size converter and to provide the manufacturing method thereof. SOLUTION: This spot size converter is constituted such that a first core 2a sets the width and thickness dimensions in a manner fulfilling single mode conditions and that a second core 3a takes a shape in which the width and the thickness dimensions monotonously decrease toward the first core 2a. The width of the cores 2a, 3a are each controlled by patterning a silicon layer, i.e., a semiconductor layer formed on one surface of a substrate 1, and are designed so that both side surfaces of the first core 2a and those of the second core 3a continue smoothly. In addition, a second upper clad 3b is formed on the second core 3a on the side opposite to the substrate 1 in a manner that the distance from the upper clad 3b to the substrate 1 monotonously decreases toward the first core 2a, with the thickness thereby controlled, and with both surfaces in the thickness direction made smoothly continuous to those in the thickness direction of the first core 2a. COPYRIGHT: (C)2005,JPO&NCIPI |
