| 摘要 |
PROBLEM TO BE SOLVED: To calibrate an atomic force/horizontal force microscope with high precision. SOLUTION: A scanning electromicroscope is, for example, built in the atomic force/horizontal force microscope for the purpose of calibration. The output of the electromicroscope is calculated by detecting secondary electrons to display a secondary electron image and reading the position (coordinates) of the tip part of a probe 11. The laser beam reflected from the surface of a leaf spring 12 is incident on a four-split photodiode 15 having four light detecting regions D1-D4. When the outputs of the light detecting region (D1+D4) and the light detecting region (D2+D3) are inputted to a differential amplifier 116, horizontal force output is obtained and, when the outputs of the light detecting region (D2+D1) and the light detecting region (D3+D4) are inputted to a differential amplifier 17, atomic force output is obtained. The detection value thus obtained is calibrated on the basis of the read value due to the electromicroscope. COPYRIGHT: (C)2005,JPO&NCIPI
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