PROTECTIVE LAYER OF INK-JET PRINTHEAD, INK-JET PRINTHEAD AND MANUFACTURING METHOD OF INK-JET PRINTHEAD

摘要

PROBLEM TO BE SOLVED: To provide an ink-jet printhead capable of improving its durability and reliability by preventing a heat layer from damaging by improving the hardness, elasticity and oxidation resistance of a cavitation layer, and a manufacturing method of the same. SOLUTION: The ink-jet printhead manufacturing method includes a step of laminating the heat layer and a conductive layer onto a substrate in order; a step of exposing a fixed domain of the top surface of the heat layer by patterning the conductive layer; a step of laminating the protective layer onto the surfaces of the conductive layer and the heat layer; and a step of forming an ink chamber by laminating an ink chamber barrier and a nozzle plate onto the top surface of the protective layer. The step of forming the protective layer includes the step of forming the cavitation layer by repeatedly interlaminating at least two kinds of thin-film layers consisting of different materials onto the upper part of the conductive layer and the heat layer. COPYRIGHT: (C)2005,JPO&NCIPI