发明名称 |
Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced |
摘要 |
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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申请公布号 |
US2005058948(A1) |
申请公布日期 |
2005.03.17 |
申请号 |
US20030661917 |
申请日期 |
2003.09.11 |
申请人 |
FREESE ROBERT P.;RINEHART THOMAS A.;WOOD ROBERT L. |
发明人 |
FREESE ROBERT P.;RINEHART THOMAS A.;WOOD ROBERT L. |
分类号 |
G02B3/00;G02B5/18;G03F7/00;G03F7/20;G03F7/24;(IPC1-7):G03F7/20 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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