| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressure sensor integrated with a pressure receiving pipe which shows a stable output without requiring temperature compensation even in an especially high temperature condition. <P>SOLUTION: This pressure sensor integrated with the pressure receiving pipe equipped with the pressure receiving pipe, and a pressure receiving pipe diaphragm is constituted so that a strain sensor element comprising a compound thin film having a composition formula (1) Cr<SB>1-(A+B)</SB>Si<SB>A</SB>C<SB>B</SB>(1) (In the formula, A is 0.01-0.9, B is 0.01-0.9, and A+B≤0.9) is formed on the diaphragm surface through a silicon oxide thin film and/or silicon nitride thin film. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
