| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectral device and its compensation method capable of maintaining wavelength accuracy to be obtained when initial wavelength calibration is performed, by compensating a wavelength shift caused by a thermal change or a change with the passage of time in a relative position of each optical element, even if the wavelength shift occurs. SOLUTION: An operation control section 6 turns a light source 3 on and makes monochromatic light pass through a first slit SL0 and a second slit SL2, finds variation from the initial position of a primary dispersed image by the first slit SL0 as a first image shift amount in a light receiving sensor array 14, finds variation from the initial position of a secondary dispersed image by the second slit SL2 as a second image shift amount, finds an image shift amount from which influence of the changes in wavelength of the monochromatic light have been removed based on the found first and second image shift amounts, and moreover converts the image shift amount into a wavelength shift amount. COPYRIGHT: (C)2005,JPO&NCIPI
|
