LIQUID EJECTION HEAD, LIQUID EJECTOR, AND PROCESS FOR MANUFACTURING LIQUID EJECTION HEAD

摘要

PROBLEM TO BE SOLVED: To provide a liquid ejection head, a liquid ejector and a process for manufacturing a liquid ejection head in which parasitic resistance can be decreased as compared with prior art when the invention is applied to a thermal inkjet printer comprising heating elements and transistors for driving the heating elements formed integrally on a substrate. SOLUTION: The gate electrode of a metal oxide field effect transistor for driving a heating element is formed of a polycide structure or a metal gate structure. COPYRIGHT: (C)2005,JPO&NCIPI