MICRO-MECHANICAL DEVICE COMPRISING A SUSPENDED ELEMENT WHICH IS CONNECTED TO A SUPPORT BY MEANS OF A PIER, AND PRODUCTION METHOD THEREOF

摘要

The invention relates to a micro-mechanical device comprising a suspended element which is connected to a support by means of a pier, and to the production method thereof. According to the invention, a cavity is etched in a substrate and said cavity opens onto the surface of the substrate opposite the suspended element (1). The aforementioned cavity comprises at least one broad zone having a section which is greater than the section of the cavity at the surface. The base (4) of the pier (2) is inserted into the cavity, said base having a complementary shape to said cavity. Moreover, the base (4), together with the cavity in the substrate, can form a dovetail assembly. Said assembly is obtained by depositing a sacrificial layer on a surface of the substrate and by etching a hole into the sacrificial layer, which passes through the sacrificial layer and reaches the surface of the substrate. Subsequently, the substrate is etched, as an extension of the hole, such as to form the cavity in the substrate, and a material which is intended to form the pier (2) is deposited in the cavity and on the walls of the hole.