| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a nano-cluster measuring instrument capable of measuring the characteristics of nano-cluster in plasma and capable of manufacturing a good solar cell on the basis of the measured characteristics, and to provide a solar cell manufacturing apparatus. <P>SOLUTION: The nano-cluster measuring instrument is equipped with a laser 2, a laser adjusting part 4+6, a measuring part 12 and a control part 10. The laser 2 emits a laser beam and the laser adjusting part 4+6 adjusts the laser beam so as to irradiate the desired region of plasma with the laser beam. In the measuring part 12, the intensity of the beam, which is emitted from the whole of or a part of the desired region when the region is irradiated with the laser beam, is measured within one or a plurality of wavelength ranges preset on the basis of the plasma. The control part 10 calculates the characteristics of a granular substance in the region on the basis of the intensity of the emitted beam within one or a plurality of the wavelength ranges. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
