MANUFACTURING METHOD AND MANUFACTURING APPARATUS FOR PIEZOELECTRIC VIBRATION DEVICE AND PIEZOELECTRIC VIBRATION DEVICE MANUFACTURED BY THE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To suppress the time and cost required to manufacture a piezoelectric vibration device by suppressing frequency variations after etching to vibration sections and eliminating a time lag at the etching.

SOLUTION: The manufacturing apparatus is provided with: an area setting means for respectively individually identifying a plurality of the vibration sections 21 and setting a plurality of principal face regions 27 to principal faces of the vibration sections 21 to individually recognize the principal face regions 27; a measurement means for measuring the frequencies of the vibration sections 21; a comparison means for comparing a preset target frequency with the measured frequencies to calculate comparison data; a determination means for determining the vibration sections 21 whose frequencies are not adjusted and the principal face regions 27 of the vibration sections 21 whose frequencies are not adjusted on the basis of the comparison data; a covering means for covering the principal face regions 27 of the vibration sections 21 determined by the determination means with a cover material 3; and an etching means for etching exposed regions not covered by the cover material 3 in the principal face regions 27 of the vibration sections 21.

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