| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for generating saturated vapor at a temperature of 100°C or lower. <P>SOLUTION: This method comprises a step for heating liquid composition made of water, alcohol, organic acid, or a mixture of these and for generating vapor, a step for introducing the vapor into a space region and for filling the space region with saturated vapor at a temperature of 100°C or lower and under atmospheric pressure, and a step for measuring the vapor temperature inside the space region and for adjusting the quantity of vapor to be introduced into the space region. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
