| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a workpiece adsorption table that is not compromised in the flatness of its main body by thermal affects, and to provide a droplet discharging device, and so on. <P>SOLUTION: In the workpiece adsorption table 152 of the droplet discharging device 1 which performs drawing on a workpiece W by discharging a functional liquid to the surface of the workpiece W by relatively moving a functional droplet discharging head 51, a thick plate-shaped adsorption table main body 183 on which the workpiece W is directly set, a valve and piping sections 553 and 572 which perform the vacuum suction and vacuum breakage on the workpiece W through an adsorption groove section 211 formed on the surface of the main body 183 and a suction hole section 214 connected to the groove section 211 and, at the same time, connected to a vacuum absorption source, and a plate-shaped support base 181 which supports the main body 183. The main body 183 and support base 181 are respectively formed of stones. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
