| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device in which further prolongation of the lifetime of an indirectly heated electrode can be achieved. SOLUTION: The light source device LS1 is provided with a gas discharge tube DT1, a heater drive circuit 50, and a grounding circuit 60. The gas discharge tube DT1 includes a heater 11 for heating, a double coil 22 as a coil member, a plate-state member 23 as a conductive member, and metal oxides 17a, 17b as an electron emissive material or the like. A surface of the heater 11 for the heating is covered with the metal oxide 17a. The heater 11 for the heating is arranged and installed at an inner side of the double coil 13 in a state of having a prescribed spacing with the double coil 13. The metal oxides 17a, 17b exist between the heater 11 for the heating and the double coil 22, and the heater 11 for the heating and the double coil 22 are not directly contacted with each other. The metal oxide 17b is retained by the double coil 13, and installed in contact with a linear member 15. COPYRIGHT: (C)2005,JPO&NCIPI
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