发明名称 |
Measurement of thin film properties using plasmons |
摘要 |
Properties of thin electrically conductive films are measured using plasmons. The plasmons are excited in the film using a suitable pump beam of electromagnetic radiation. A probe beam of electromagnetic radiation is directed onto the excited film and is diffracted thereby and the diffracted beam is detected. The detected signal indicates film properties such as thickness and surface roughness.
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申请公布号 |
US2005057754(A1) |
申请公布日期 |
2005.03.17 |
申请号 |
US20040888555 |
申请日期 |
2004.07.08 |
申请人 |
SMITH DAVID E. A.;IMANI BEHZAD;SHAMMA NADER;MAXTON PATRICK M.;BRONGERSMA MARK LUITZEN |
发明人 |
SMITH DAVID E. A.;IMANI BEHZAD;SHAMMA NADER;MAXTON PATRICK M.;BRONGERSMA MARK LUITZEN |
分类号 |
G01N21/47;G01N21/55;G01N21/63;G01N21/84;(IPC1-7):G01N21/55 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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地址 |
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