PHASE DELAY ELEMENT AND METHOD FOR PRODUCING A PHASE DELAY ELEMENT

摘要

In a method for producing a zeroth- or low-order phase delay element, in particular a phase delay element for wavelengths chi < 200nm, the phase delay element is formed from a birefrigent crystalline material. A temporary carrier plate (1) is produced, which is provided with a plane-processed side (3). Afterwards, an anisotropic crystal plate (2) is produced, after which the temporary carrier plate (1) is connected to the anisotropic crystal plate (2) by means of a connecting means/connecting layer (6). A large part of the anisotropic crystal plate (2) is then separated away except from a residual layer, after which an end thickness of the anisotropic crystal plate (2) is reached by means of further production and polishing methods. A second final carrier plate (8), which is produced by means of production and polishing methods, is directly connected to the anisotropic crystal plate (2), after which finally the temporary carrier plate (1) is separated or detached from the anisotropic crystal plate (2).