SILICON PRODUCTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a compact-sized silicon production apparatus capable of efficiently producing silicon. SOLUTION: The production apparatus of polycrystalline silicon has a reaction tube 2 of which the base material is a carbon material and into which chlorosilanes and hydrogen are supplied to react with each other to deposit silicon on the inner surface of the tube and a high-frequency heating coil 3 for heating the reaction tube 2. In the production apparatus, a plurality of reaction tubes 2 are arranged in parallel; and a high-frequency heating coil 4 is wound on the outer periphery of a reaction tube part 2a formed by these reaction tubes 2 with some clearance between the coil and each reaction tube 2. COPYRIGHT: (C)2005,JPO&NCIPI